SiC Trench Plasma Etching for SiC Power Device Fabrication - Samco Inc.
SPM Fluorine Etching
Etch Overview
GaN forward taper trench etch｜Samco Inc.
Shallow trench isolation - Wikiwand
Using Victory Process Open Model Interface to Customize Etch Emulation Model – Example - Silvaco
Systematic Characterization of Plasma-Etched Trenches on 4H-SiC Wafers | ACS Omega
High aspect ratio via etching conditions for deep trench of silicon - ScienceDirect
SiC Trench Plasma Etching for SiC Power Device Fabrication - Samco Inc.
Trench Etch Profile on MESA
BEOL (Back End of Line: interconnect process, the second half of wafer processing) 10. Metal-1 | USJC：United Semiconductor Japan Co., Ltd.
Micromachines | Free Full-Text | Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD
trench etching
![PDF] Microtrenching resulting from specular reflection during chlorine etching of silicon | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/531014d7cb7b40f1687f1fddc4f2d56eedc3eb79/2-Figure1-1.png "PDF] Microtrenching resulting from specular reflection during chlorine etching of silicon | Semantic Scholar")
PDF] Microtrenching resulting from specular reflection during chlorine etching of silicon | Semantic Scholar
Plasma etching of the trench pattern with high aspect ratio mask under ion tilting - ScienceDirect
Wet etching of deep trenches on silicon with three-dimensional (3D) controllability | Semantic Scholar
Dry etching of Silicon is not just trench making.
Morphology improvement of SiC trench by inductively coupled plasma etching using Ni/Al2O3 bilayer mask - ScienceDirect
In situ Metrology for Etch Endpoint Detection - Coventor
GaN Deep Trench Etch｜Samco Inc.
Trench Etch Profile on Si Wafer
Optimisation of the trench entrance etch sequence. The deposition step... | Download Scientific Diagram
